KLA claims its tools have very few consumables. Most of the tool value derived from performance guarantees and system uptime. The service revenue per tool in its lifetime is now equal to the ASP of the tool, vs 40-50% in 2013, per KLA. Its service business growth guidance is 10-12% LTM CAGR. Also, claims 3rd parties may be able to service tools in restricted fabs but performance may not match with KLA services (comments at BofA conference).
Source: Sravan Kundojjala
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